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http://hdl.handle.net/10119/10882
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タイトル: | Liquid-phase explosive crystallization of electron-beam-evaporated a-Si films induced by flash lamp annealing |
著者: | Ohdaira, Keisuke Matsumura, Hideki |
キーワード: | Liquid phase epitaxy Recrystallization Semiconducting silicon Solar cells X-ray diffraction |
発行日: | 2011-11-25 |
出版者: | Elsevier |
誌名: | Journal of Crystal Growth |
巻: | 362 |
開始ページ: | 149 |
終了ページ: | 152 |
DOI: | 10.1016/j.jcrysgro.2011.11.028 |
抄録: | We succeed in the formation of micrometer-order-thick polycrystalline silicon (poly-Si) films through the flash-lamp-induced liquid-phase explosive crystallization (EC) of precursor a-Si films prepared by electron-beam (EB) evaporation. The velocity of the explosive crystallization (v_<EC>) is estimated to be ∼14 m/s, which is close to the velocity of the liquid-phase epitaxy (LPE) of Si at a temperature around the melting point of a-Si of 1418 K. Poly-Si films formed have micrometer-order-long grains stretched along a lateral crystallization direction, and X-ray diffraction (XRD) and electron diffraction pattern measurements reveal that grains in poly-Si films tend to have a particular orientation. These features are significantly different from our previous results: the formation of poly-Si films containing randomly-oriented 10-nm-sized fine grains formed from a-Si films prepared by catalytic chemical vapor deposition (Cat-CVD) or sputtering. One possible reason for the emergence of a different EC mode in EB-evaporated a-Si films is the suppression of solid-phase nucleation (SPN) during Flash Lamp Annealing (FLA) due to tensile stress which precursor a-Si films originally hold. Poly-Si films formed from EB-evaporated a-Si films would contribute to the realization of high-efficiency thin-film poly-Si solar cells because of large and oriented grains. |
Rights: | NOTICE: This is the author's version of a work accepted for publication by Elsevier. Keisuke Ohdaira, Hideki Matsumura, Journal of Crystal Growth, 362, 2011, 149-152, http://dx.doi.org/10.1016/j.jcrysgro.2011.11.028 |
URI: | http://hdl.handle.net/10119/10882 |
資料タイプ: | author |
出現コレクション: | z8-10-1. 雑誌掲載論文 (Journal Articles)
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