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このアイテムの引用には次の識別子を使用してください:
http://hdl.handle.net/10119/15421
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| タイトル: | Fine-patterning of sol-gel derived PZT film by a novel lift-off process using solution-processed metal oxide as a sacrificial layer |
| 著者: | Trong Tue, Phan
Shimoda, Tatsuya
Takamura, Yuzuru |
| キーワード: | PZT film
Micro-patterning
Lift-off
In-Zn-O metal oxide |
| 発行日: | 2016-08-29 |
| 出版者: | Elsevier |
| 誌名: | Ceramics International |
| 巻: | 42 |
| 号: | 16 |
| 開始ページ: | 18431 |
| 終了ページ: | 18435 |
| DOI: | 10.1016/j.ceramint.2016.08.177 |
| 抄録: | Sub-5 µm pattern of sol-gel derived lead-zirconium-titanate (PZT) film with a thickness of 80–390 nm was successfully prepared on Pt(111)/TiOx/SiO_2/Si (100) substrate by a novel lift-off process using solution-processed metal oxides as a sacrificial layer. The process is simply divided into three steps: In-Zn-O (IZO) sacrificial layer spin-coating and patterning, PZT film formation followed by lift-off process. The results suggested that the IZO layer is effective in preventing PZT crystallization because of its thermal stability during PZT post-annealing, and its barrier-effects between the spin-coated PZT precursor and the Pt/TiO_x substrate. Consequently, the micro-pattern of lift-off PZT exhibited better properties than that formed by wet-etching. In particular, the lift-off PZT films possessed better ferroelectric properties, higher break-down voltage, and more well-defined shape than those of films patterned by conventional wet-etching. This lift-off process shows great promise for highly integrated devices due to its fine pattern-ability. |
| Rights: | Copyright (C)2016, Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International license (CC BY-NC-ND 4.0). [http://creativecommons.org/licenses/by-nc-nd/4.0/] NOTICE: This is the author's version of a work accepted for publication by Elsevier. Phan Trong Tue, Tatsuya Shimoda, and Yuzuru Takamura, Ceramics International, 42(16), 2016, 18431-18435, http://dx.doi.org/10.1016/j.ceramint.2016.08.177 |
| URI: | http://hdl.handle.net/10119/15421 |
| 資料タイプ: | author |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
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