|
JAIST Repository >
c. マテリアルサイエンス研究科・マテリアルサイエンス系 >
c10. 学術雑誌論文等 >
c10-1. 雑誌掲載論文 >
このアイテムの引用には次の識別子を使用してください:
http://hdl.handle.net/10119/17051
|
| タイトル: | Improvement in the passivation quality of catalytic-chemical-vapor-deposited silicon nitride films on crystalline Si at room temperature |
| 著者: | Miyaura, Jun'ichiro
Ohdaira, Keisuke |
| キーワード: | Silicon nitride
Catalytic chemical vapor deposition
Passivation
Crystalline silicon
Solar cell |
| 発行日: | 2019-02-07 |
| 出版者: | Elsevier |
| 誌名: | Thin Solid Films |
| 巻: | 674 |
| 開始ページ: | 103 |
| 終了ページ: | 106 |
| DOI: | 10.1016/j.tsf.2019.02.006 |
| 抄録: | We observe an improvement in the passivation quality of silicon nitride (SiN_x) films formed on crystalline silicon wafers by catalytic chemical vapor deposition (Cat-CVD) under the storage at room temperature. Fluorescent light illumination enhances the improvement in the passivation quality of Cat-CVD SiN_x films, although the passivation quality is also improved in the dark. We do not see any change of bonding configurations in the SiN_x films by the storage at room temperature. Capacitance–voltage measurement reveals that an increase in positive charge density in the SiN_x films improves their passivation quality. The improvement in the passivation quality of SiN_x films is observed for SiN_x films deposited at various substrate temperatures, and SiN_x films deposited at higher temperature tends to show more significant improvement in the passivation quality. |
| Rights: | Copyright (C)2019, Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International license (CC BY-NC-ND 4.0). [http://creativecommons.org/licenses/by-nc-nd/4.0/] NOTICE: This is the author's version of a work accepted for publication by Elsevier. Jun'ichiro Miyaura, and Keisuke Ohdaira, Thin Solid Films, 674, 2019, 103-106, http://dx.doi.org/10.1016/j.tsf.2019.02.006 |
| URI: | http://hdl.handle.net/10119/17051 |
| 資料タイプ: | author |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
|
このアイテムのファイル:
| ファイル |
記述 |
サイズ | 形式 |
|---|
| 3030.pdf | | 629Kb | Adobe PDF | 見る/開く |
|
当システムに保管されているアイテムはすべて著作権により保護されています。
|
