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Please use this identifier to cite or link to this item: http://hdl.handle.net/10119/18227

Title: Crystallization behavior of electron-beam-evaporated amorphous silicon films on textured glass substrates by flash lamp annealing
Authors: Yago, Aimi
Ohdaira, Keisuke
Issue Date: 2021-04-15
Publisher: Elsevier
Magazine name: Thin Solid Films
Start page: 138681
DOI: 10.1016/j.tsf.2021.138681
Abstract: Flash lamp annealing (FLA) is one of the short-duration annealing methods suitable for the crystallization of micrometer-order-thick amorphous silicon (a-Si) films for thin-film polycrystalline silicon (poly-Si) solar cells. The crystallization of electron-beam- (EB-) evaporated a-Si films formed on flat glass substrates by FLA is known to take place through explosive crystallization (EC), by which laterally stretched large crystal grains are formed. In this study, we experimentally investigate the behavior of the FLA-induced crystallization of EB-evaporated a-Si films on glass substrates with intentionally roughed surfaces. When a-Si films on the textured glass substrates receive a FL pulse light consisting of sub-pulses with variable emission frequency, macroscopic stripe patterns with a constant width are observed on the poly-Si surface. This indicates the emergence of EC in EB-evaporated a-Si films also on textured glass substrates, similar to the case of a-Si films on flat substrates. Poly-Si films formed on textured glass substrates have smaller Si crystal grains in the vicinity of the Si/glass interface than the grains near the surface. Moreover, the lateral crystallization velocity of a-Si films on texture glass substrates is smaller compared to that on flat glass substrates. These indicate that the behavior of the EC of EB-evaporated a-Si films is affected by the surface morphology of glass substrates.
Rights: Copyright (C)2021, Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International license (CC BY-NC-ND 4.0). [http://creativecommons.org/licenses/by-nc-nd/4.0/] NOTICE: This is the author's version of a work accepted for publication by Elsevier. Aimi Yago, Keisuke Ohdaira, Thin Solid Films, 2021, 138681,DOI:10.1016/j.tsf.2021.138681. https://doi.org/10.1016/j.tsf.2021.138681
URI: http://hdl.handle.net/10119/18227
Material Type: author
Appears in Collections:c10-1. 雑誌掲載論文 (Journal Articles)

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