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http://hdl.handle.net/10119/2165
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Title: | ガリウム砒素を用いたカンチレバーの試作 |
Authors: | 岩田, 展也 |
Authors(alternative): | いわた, のぶや |
Keywords: | ガリウム砒素,カンチレバー,ファブリケーション gallium arsenide, cantilever, fabrication |
Issue Date: | Mar-2004 |
Description: | Supervisor:山田 省二 材料科学研究科 博士 |
Title(English): | Microfabrication of Gallium Arsenide Cantilever for Atomic Force Microscope Application |
Authors(English): | Iwata, Nobuya |
URI: | http://hdl.handle.net/10119/2165 |
Appears in Collections: | D-MS. 2003年度(H15) (Jun.2003 - Mar.2004)
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