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http://hdl.handle.net/10119/2446
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Title: | ECRスパッタ法によるSrTiO3薄膜のエピタキシャル成長と評価 |
Authors: | 目黒, 伸也 |
Authors(alternative): | めぐろ, しんや |
Keywords: | ECRスパッタ法,SrTiO3,エピタキシャル膜 ECR sputtering,SrTiO3,epitaxal |
Issue Date: | Mar-1998 |
Description: | Supervisor:五味 学 材料科学研究科 修士 |
Title(English): | Groth and evaluation of SrTiO3 thin films deposited by sputtering |
Authors(English): | Meguro, Shinya |
Language: | jpn |
URI: | http://hdl.handle.net/10119/2446 |
Appears in Collections: | M-MS. 1997年度(H09) (Jun.1997 - Mar.1998)
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