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c. マテリアルサイエンス研究科・マテリアルサイエンス系 >
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c10-1. 雑誌掲載論文 >
このアイテムの引用には次の識別子を使用してください:
http://hdl.handle.net/10119/9001
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| タイトル: | Polycrystalline Si films with unique microstructures formed from amorphous Si films by non-thermal equilibrium flash lamp annealing |
| 著者: | Ohdaira, Keisuke
Nishikawa, Takuya
Shiba, Kazuhiro
Takemoto, Hiroyuki
Matsumura, Hideki |
| キーワード: | 62.23.St
68.55.-a
81.10.Jt
81.15.Gh
81.16.Dn
84.60.Jt |
| 発行日: | 2010-04 |
| 出版者: | Wiley |
| 誌名: | physica status solidi (c) |
| 巻: | 7 |
| 号: | 3-4 |
| 開始ページ: | 604 |
| 終了ページ: | 607 |
| DOI: | 10.1002/pssc.200982820 |
| 抄録: | Flash lamp annealing (FLA), with millisecond-order duration, can crystallize amorphous silicon (a-Si) films a few m thick on glass substrates, resulting in formation of polycrystalline Si (poly-Si) films with unprecedented periodic microstructures. The characteristic microstructure, formed spontaneously during crystallization, consists of large-grain regions, containing relatively large grains more than 100 nm in size, and fine-grain regions, including only 10-nm-sized fine grains. The microstructures results from explosive crystallization (EC), driven by heat generation corresponding to the difference of the enthalpies of meta-stable a-Si and stable crystalline Si (c-Si) states, which realizes lateral crystallization velocity on the order of m/s. The lateral crystallization may stop when the temperature of a-Si in the vicinity of c-Si, which is decided by both homogeneous heating from flash irradiation and thermal diffusion from c-Si, falls below a crystallization temperature. This idea is supported by the experimental fact that a lateral crystallization length decreases with decreasing pulse duration. |
| Rights: | Copyright (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. This is the pre-peer reviewed version of the following article: Keisuke Ohdaira, Takuya Nishikawa, Kazuhiro Shiba, Hiroyuki Takemoto, Hideki Matsumura, physica status solidi (c), 7(3-4), 2010, 604-607. http://dx.doi.org/10.1002/pssc.200982820 |
| URI: | http://hdl.handle.net/10119/9001 |
| 資料タイプ: | author |
| 出現コレクション: | c10-1. 雑誌掲載論文 (Journal Articles)
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