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JAIST Repository >
著者: "Hayakawa, Taro"
2 著者名表示.
発行日 | タイトル |
著者 |
2011 | Extremely Low Recombination Velocity on Crystalline Silicon Surfaces Realized by Low-Temperature Impurity Doping in Cat-CVD Technology | Hayakawa, Taro; Miyamoto, Motoharu; Koyama, Koichi; Ohdaira, Keisuke; Matsumura, Hideki |
16-Sep-2014 | Cat-doping: Novel method for phosphorus and boron shallow doping in crystalline silicon at 80 °C | Matsumura, Hideki; Hayakawa, Taro; Ohta, Tatsunori; Nakashima, Yuki; Miyamoto, Motoharu; Trinh, Cham Thi; Koyama, Koichi; Ohdaira, Keisuke |
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