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タイトル: Suppression of drain-induced barrier lowering by double-recess overlapped gate structure in normally-off AlGaN-GaN MOSFETs
著者: Sato, Taku
Uryu, Kazuya
Okayasu, Junichi
Kimishima, Masayuki
Suzuki, Toshi-kazu
キーワード: AlGaN-GaN
MOSFET
normally-off
drain-induced barrier lowering (DIBL)
発行日: 2018-08-10
出版者: American Institute of Physics
誌名: Applied Physics Letters
巻: 113
号: 6
開始ページ: 063505-1
終了ページ: 063505-4
DOI: 10.1063/1.5039886
抄録: We investigated drain-induced barrier lowering (DIBL) in normally-off AlGaN-GaN metaloxide-semiconductor field-effect transistors (MOSFETs) with a double-recess overlapped gate structure. It is found that the double-recess overlapped gate structure can suppress DIBL; the threshold voltage is constant without lowering for high drain-source voltages, and sub-threshold characteristics remains excellent. We elucidate the mechanism of the DIBL suppression by considering a local potential in the MOSFETs. In addition, it is also found that the double-recess overlapped gate structure is beneficial for current collapse suppression.
Rights: Copyright 2018 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Taku Sato, Kazuya Uryu, Junichi Okayasu, Masayuki Kimishima, and Toshi-kazu Suzuki, Applied Physics Letters, 113(6), 063505 (2018) and may be found at http://dx.doi.org/10.1063/1.5039886
URI: http://hdl.handle.net/10119/16104
資料タイプ: publisher
出現コレクション:c10-1. 雑誌掲載論文 (Journal Articles)

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