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このアイテムの引用には次の識別子を使用してください:
http://hdl.handle.net/10119/19956
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| タイトル: | Low-frequency noise in AlTiO/AlGaN/GaN metal-insulator-semiconductor field-effect transistors with non-gate-recessed or partially-gate-recessed structures |
| 著者: | Nguyen, Duong Dai
Deng, Yuchen
Suzuki, Toshi-kazu |
| 発行日: | 2023-08-11 |
| 出版者: | IOP Publishing |
| 誌名: | Semiconductor Science and Technology |
| 巻: | 38 |
| 号: | 9 |
| 開始ページ: | 095010 |
| DOI: | 10.1088/1361-6641/acec64 |
| 抄録: | We have systematically investigated low-frequency noise (LFN) in AlTiO/AlGaN/GaN metal-insulator-semiconductor field-effect transistors (MIS-FETs) with non-gate-recessed or partially-gate-recessed structures, where gate insulators using AlTiO, an alloy of Al2O3 and TiO2, are obtained by atomic layer deposition. For drain current LFN, we find pure 1/f spectra for the well-above-threshold regime, and superposition of 1/f and Lorentzian spectra near the threshold voltage. The Hooge parameters are evaluated from the 1/f contribution and found to be independent of the AlTiO thickness. However, the remaining AlGaN thickness strongly affects the Hooge parameter near the threshold voltage; in the low channel electron concentration regime of the partially-gate-recessed FETs, a smaller remaining AlGaN thickness gives a larger Hooge parameter proportional to the inverse of the electron concentration, indicating that channel electron number fluctuation dominates the Hooge parameter. We consider that the channel electron number fluctuation is caused by electron traps introduced by the recess etching process in the remaining AlGaN. On the other hand, the Lorentzian spectra give specific time constants almost independent of the AlTiO thickness and the remaining AlGaN thickness, corresponding to trap depths of 0.6-0.8 eV. This can be attributed to traps in AlTiO near the AlTiO/AlGaN interface. |
| Rights: | Copyright (c) 2023 IOP Publishing. This is the Accepted Manuscript version of an article accepted for publication in Semiconductor Science and Technology, 38, 9, 095010. This is distributed under a Creative Commons Attribution (CC BY-NC-ND) license (https://creativecommons.org/licenses/by-nc-nd/4.0/). The Version of Record is available online at https://doi.org/10.1088/1361-6641/acec64. |
| URI: | http://hdl.handle.net/10119/19956 |
| 資料タイプ: | author |
| 出現コレクション: | g10-1. 雑誌掲載論文 (Journal Articles)
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